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17 January 2008 Analysis for nonlinear error of improved 2D-PSD and its applications
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Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67231P (2008) https://doi.org/10.1117/12.783191
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
Expound the lateral photoeffect, the operating principle, architecture and characters of improved two dimensional position sensitive detector. A new bridge theory is put forward to analyze the reason of nonlinearity errors produced by the center and edge of 2D-PSD. A signal processing circuit of improved 2D-PSD including high-precision, low temperature excursion and high input impedance preamplifier, summator, subtracter and divider is used in high-precision laser collimation system. The signal processing circuit converts the optical signals processed by optical system including optical lenses, diaphragm, light filter etc into electrical signals, then the electrical signals will be sent into data acquisition system. The straightness measure results of work-piece will be showed on computer by the linearity evaluation software. The characters of this system: fast response, high-resolution position, real-time detection etc. In the end, measuring results and some important conclusions are presented.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tianze Li, Shuyun Wang, Boxue Tan, and Hongmeng Yan "Analysis for nonlinear error of improved 2D-PSD and its applications", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67231P (17 January 2008); https://doi.org/10.1117/12.783191
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