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17 January 2008Interferometric measurements of mid-spatial scale surface irregularities
A simple method which can be used to map mid-spatial scale surface irregularities with high signal noise ratio is described. Two major sources of errors are analyzed and removed. One is the contributions of small-scale irregularities of the reference surface, which are subtracted by shifting the test surface laterally by a distance. The other is the spurious response of CCD, which is removed by interpolation function. The presented method is verified by simulations and experiments. It shows that it can measure mid-spatial scale surface irregularities exactly and smaller scale surface irregularities can be obtained by making measurement for a series of the lateral shifting values corresponding to one-half of the pixel space on CCD.
Jiancheng Xu,Qiao Xu,Liqun Chai, andYan Deng
"Interferometric measurements of mid-spatial scale surface irregularities", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67233M (17 January 2008); https://doi.org/10.1117/12.783513
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Jiancheng Xu, Qiao Xu, Liqun Chai, Yan Deng, "Interferometric measurements of mid-spatial scale surface irregularities," Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67233M (17 January 2008); https://doi.org/10.1117/12.783513