Interferometric measurements of mid-spatial scale surface irregularities

Jiancheng Xu; Qiao Xu; Liqun Chai; Yan Deng

doi:10.1117/12.783513

17 January 2008 Interferometric measurements of mid-spatial scale surface irregularities

Jiancheng Xu, Qiao Xu, Liqun Chai, Yan Deng

Author Affiliations +

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67233M (2008) https://doi.org/10.1117/12.783513
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A simple method which can be used to map mid-spatial scale surface irregularities with high signal noise ratio is described. Two major sources of errors are analyzed and removed. One is the contributions of small-scale irregularities of the reference surface, which are subtracted by shifting the test surface laterally by a distance. The other is the spurious response of CCD, which is removed by interpolation function. The presented method is verified by simulations and experiments. It shows that it can measure mid-spatial scale surface irregularities exactly and smaller scale surface irregularities can be obtained by making measurement for a series of the lateral shifting values corresponding to one-half of the pixel space on CCD.

Citation Download Citation

Jiancheng Xu, Jiancheng Xu, Qiao Xu, Qiao Xu, Liqun Chai, Liqun Chai, Yan Deng, Yan Deng, "Interferometric measurements of mid-spatial scale surface irregularities", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67233M (17 January 2008); doi: 10.1117/12.783513; https://doi.org/10.1117/12.783513

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years