27 November 2007 Research on key technologies of non-contact measurement system of optical aspheric surface
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Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 672359 (2007) https://doi.org/10.1117/12.783748
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
According to the requirement of high precision measurement of optical aspheric surface, 4D measurement platform is under development. Open motion control system is adapted and multi-axes motion control card is mounted in IPC. Repeatability accuracy and positioning accuracy of the full travel of the driving unit of the platform can reach to 0.3μm and 1μm respectively. Laser sensor is droven by the ultrasonic LM (USLM) to the position needed to be tested. The fine positioning of the unit is achieved by USLM with its DC drive mode, which can perform nanometer steps proportional to the input voltages. The positioning error of the driving unit can not be prevented. In this paper, the mathematic model of error compensation of the USLM driving unit is found and software compensation is introduced. Results of compensation show that the position accuracy of this driving unit is greatly improved and can fulfill the task of optical aspheric mirror surface measurement.
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Gujin Liu, Gujin Liu, Yinbiao Guo, Yinbiao Guo, Jianchun Liu, Jianchun Liu, } "Research on key technologies of non-contact measurement system of optical aspheric surface", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672359 (27 November 2007); doi: 10.1117/12.783748; https://doi.org/10.1117/12.783748
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