27 November 2007 Method for removing temperature shifting during measurement of large mirrors in grinding process
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Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67235K (2007) https://doi.org/10.1117/12.783785
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
In order to provide precise feedbacks to manufactures, the effect of temperature shifting must be removed from the measurement results. To remove the effect of temperature shifting to measurement results, large mirrors were measured twice. The first measurement procedure was done fast, often for several points a line. These measured data were set as datum for removing the temperature shifting. The second measurement procedure was done densely, for about 100 points a line. After the abovementioned two measurement procedures, a temperature-shifting-removing program was developed to remove temperature shifting, which fits the densely measured data to the datum data. To verify the validity of this temperature-shifting-removing method, we have made a comparison of the results of a spherical mirror 200mm in diameter measured by this method and the results of the same mirror measured by using Form Talysurf PGI 1240 from Taylor Hobson. Two measurement results show good agreement.
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Hongwei Jing, Hongwei Jing, Long Kuang, Long Kuang, Bin Fan, Bin Fan, } "Method for removing temperature shifting during measurement of large mirrors in grinding process", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235K (27 November 2007); doi: 10.1117/12.783785; https://doi.org/10.1117/12.783785
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