Application of SPM interferometry in MEMS vibration measurement

Chaowei Tang; Guotian He; Changbiao Xu; Lijuan Zhao; Jun Hu

doi:10.1117/12.783793

17 January 2008 Application of SPM interferometry in MEMS vibration measurement

Chaowei Tang, Guotian He, Changbiao Xu, Lijuan Zhao, Jun Hu

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67235P (2008) https://doi.org/10.1117/12.783793
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The resonant frequency measurement of cantilever has an important position in MEMS(Micro Electro Mechanical Systems) research. Meanwhile the SPM interferometry is a high-precision optical measurement technique, which can be used in physical quantity measurement of vibration, displacement, surface profile. Hence, in this paper we propose to apply SPM(SPM) interferometry in measuring the vibration of MEMS cantilever and in the experiment the vibration of MEMS cantilever was driven by light source. Then this kind of vibration was measured in nm precision. Finally the relational characteristics of MEMS cantilever vibration under optical excitation can be gotten and the measurement principle is analyzed. This method eliminates the influence on the measuring precision caused by external interference and light intensity change through feedback control loop. Experiment results prove that this measurement method has a good effect.

Citation Download Citation

Chaowei Tang, Guotian He, Changbiao Xu, Lijuan Zhao, and Jun Hu "Application of SPM interferometry in MEMS vibration measurement", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235P (17 January 2008); https://doi.org/10.1117/12.783793

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KEYWORDS

Microelectromechanical systems

Interferometry

Scanning probe microscopy

Interferometers

Feedback control

Modulation

Semiconductor lasers

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