SPM interferometer with large range for mirco-vibration measurement

Mingyi Fu; Chaowei Tang; Guotian He; Jun Hu; Li Wang

doi:10.1117/12.783831

17 January 2008 SPM interferometer with large range for mirco-vibration measurement

Mingyi Fu, Chaowei Tang, Guotian He, Jun Hu, Li Wang

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67235V (2008) https://doi.org/10.1117/12.783831
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The measuring range and precision are two inconsistent parameters of traditional optical interferometry. In this paper, the interferometer measuring vibration with high precision and large range is proposed and its measuring principle is analyzed in detail. The interferometer obtains phase information by processing interference signals with two real-time phase discriminator and the vibration displacement could be gotten by expanding this phase. The measuring range was enlarged from half wavelength to millimeter. Meanwhile, the measuring precision was independent of external disturbance and vibration displacement measurement with high precision was realized. The measuring range of vibration displacement for 6000.5nm and the repeatable measuring precision was 5.72nm from experiment. The feasibility of the measuring method was validated by experiments.

Citation Download Citation

Mingyi Fu, Chaowei Tang, Guotian He, Jun Hu, and Li Wang "SPM interferometer with large range for mirco-vibration measurement", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235V (17 January 2008); https://doi.org/10.1117/12.783831

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