Design of a new MEMS-based tunable grating with electrostatic comb drive

Yiting Yu; Weizheng Yuan; Jinghui Xu

doi:10.1117/12.782857

21 November 2007 Design of a new MEMS-based tunable grating with electrostatic comb drive

Yiting Yu, Weizheng Yuan, Jinghui Xu

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67241G (2007) https://doi.org/10.1117/12.782857
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A new MEMS-based tunable grating with programmable grating period, driven by electrostatic comb, was designed. Finite element model was developed and finite element simulation was performed with ANSYS. Modal analysis and static analysis were carried out. To improve the calculation efficiency, electrostatic driving force at each movable comb was directly computed by analytical method instead of time-consuming coupled-field analysis. The results show that this MEMS-based tunable grating functions quite well when a driving voltage is provided. To operate at its working resonating mode much easier, thicker grating structure is needed, revealing the necessity in using the bulk micromachining such as SOI technology to fabricate the grating. Also, larger the length of connecting beam and spring beam, and smaller the width of spring beam, larger the deflection we can get for a specific driving voltage. The designed MEMS-based tunable grating can be applied in many fields.

Citation Download Citation

Yiting Yu, Weizheng Yuan, and Jinghui Xu "Design of a new MEMS-based tunable grating with electrostatic comb drive", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241G (21 November 2007); https://doi.org/10.1117/12.782857

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