21 November 2007 Analysis on the influencing factors of deformation in bimorph deformable mirror
Author Affiliations +
Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67241P (2007) https://doi.org/10.1117/12.782918
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
Numerical calculation is used to investigate influencing factors on the surface displacement of a bimorph deformable mirror. It's shown that the value of response function is direct proportional to the loading voltage, inverse proportional to the square of the thickness of PZT layer, and increased about 1.4 times when the area of the electrode doubles. Besides, the displacement is closely related to the distance of the control layer from median plane. As a conclusion, the farther electrode contributes the larger deformation. Furthermore, we have discussed the problem of singular solutions at inner and outer boundary.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu Ning, Yu Ning, Wenhan Jiang, Wenhan Jiang, Ning Ling, Ning Ling, Changhui Rao, Changhui Rao, } "Analysis on the influencing factors of deformation in bimorph deformable mirror", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241P (21 November 2007); doi: 10.1117/12.782918; https://doi.org/10.1117/12.782918
PROCEEDINGS
5 PAGES


SHARE
RELATED CONTENT

Performance of the deformable mirror for Subaru LGSAO
Proceedings of SPIE (June 28 2006)
Poly-SiGe MEMS actuators for adaptive optics
Proceedings of SPIE (January 23 2006)
Multiple mirror control system
Proceedings of SPIE (October 25 2004)

Back to Top