From rule to model-based design: A need for DfP criteria?

A. Balasinski; N. Kachwala; D. Abercrombie

doi:10.1117/12.746818

30 October 2007 From rule to model-based design: A need for DfP criteria?

A. Balasinski, N. Kachwala, D. Abercrombie

Proceedings Volume 6730, Photomask Technology 2007; 67300R (2007) https://doi.org/10.1117/12.746818
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

Traditional design rules to ensure device functionality and yield are defined by multiple criteria. However, in a complex and mature design and manufacturing environment and a quickly changing marketplace, one should consider a more comprehensive and efficient way to gradually replace the rigid design rules with yield and product models based on the extracted layout features, process capabilities, and market conditions. This methodology may be of particular attractiveness for custom products such as Systems-on-Chip where the complexity of customized design rules can be a detriment for product optimization. In addition, the key criterion for product development: profitability in the marketplace, or Design-for-Profit (DfP), has usually not been taken into account in the verification of design kits. In this paper, we would discuss how yield models can help re-derive the existing design rule and "recommended rule" methodology and take it to the next level of a comprehensive product development using model based design.

Citation Download Citation

A. Balasinski, N. Kachwala, and D. Abercrombie "From rule to model-based design: A need for DfP criteria?", Proc. SPIE 6730, Photomask Technology 2007, 67300R (30 October 2007); https://doi.org/10.1117/12.746818

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