Projection maskless patterning (PMLP) for the fabrication of leading-edge complex masks and nano-imprint templates

Elmar Platzgummer; Hans Loeschner; Gerhard Gross

doi:10.1117/12.746363

30 October 2007 Projection maskless patterning (PMLP) for the fabrication of leading-edge complex masks and nano-imprint templates

Elmar Platzgummer, Hans Loeschner, Gerhard Gross

Author Affiliations +

Proceedings Volume 6730, Photomask Technology 2007; 673033 (2007) https://doi.org/10.1117/12.746363
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

The reliable and cost-effective fabrication of 2D and 3D structured nano-surfaces is prerequisite for a number of industrial and emerging applications: (i) leading-edge complex masks, (ii) high precision nano-imprint templates, (iii) nano-functionalized surfaces and 3D structures for applications in nano-photonics, nano-magnetics, and nano-biotechnology. Projection Mask-Less Patterning (PMLP) is based on many hundred thousands of ion beams working in parallel. A PMLP proof-of-concept tool has been realized as part of the European project CHARPAN (Charged Particle Nanotech; www.charpan.com). The novel ion beam projection optics with 200x reduction shows 16nm half pitch resolution. First results with a programmable aperture plate system have been achieved demonstrating high accuracy and flexible pattern fabrication.

Citation Download Citation

Elmar Platzgummer, Hans Loeschner, and Gerhard Gross "Projection maskless patterning (PMLP) for the fabrication of leading-edge complex masks and nano-imprint templates", Proc. SPIE 6730, Photomask Technology 2007, 673033 (30 October 2007); https://doi.org/10.1117/12.746363

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available