ADAS (Automated Defect Analysis Software) is the first product to fully automate mask defect analysis for mask shops
and fabs. ADAS classifies and dispositions photomask defects quickly and accurately. Disposition is based on defect
size and printability measurements from simulation.
Full analysis of inspection reports with 100 defects requires 2 seconds. Printability measurements match AIMS within 6
percent at 3 sigma on 45 nm test masks. Repeatability is 5 percent at 3 sigma over multiple inspections. ADAS can
reduce the need for production AIMS measurements by 90% and eliminate operator review errors and the repelliclizations
they cause. ADAS increases overall inspection efficiency for mask shop first-inspection and final
inspection. It can automate fab requalification inspections and eliminate the need for incoming inspection.