Oxygen Ion Cleaning Of Organic Contaminants

T J Deguchi; G R Sasaki; R J Champetier

doi:10.1117/12.939506

3 June 1987 Oxygen Ion Cleaning Of Organic Contaminants

T J Deguchi, G R Sasaki, R J Champetier

Proceedings Volume 0675, Stray Radiation V; (1987) https://doi.org/10.1117/12.939506
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

An experiment using low energy oxygen ions to clean organic films from bare aluminum mirrors was performed. Film removal was determined by measuring the reflectance of the mirrors in the ultraviolet region of the spectrum. The results of this study show that complete removal of hydrocarbon films is obtainable. This method may not be fully effective in removing silicon-based polymers. The removal rate for a hydrocarbon oil contami nant was determined to be 2.1 X 10^-14Å/ion.

Citation Download Citation

T J Deguchi, G R Sasaki, and R J Champetier "Oxygen Ion Cleaning Of Organic Contaminants", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939506

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