Translator Disclaimer
Paper
13 February 1987 Near-Angle Scatter Measurement On Diamond-Turned Surfaces
Author Affiliations +
Abstract
The design and operation of a near-angle scatterometer that measures the total integrated scatter (TIS) from bare and coated diamond-turned surfaces are described. The scatterometer is designed to make TIS measurements from 0.06 out to 4 deg from the specular beam. Both bare and coated diamond-turned surfaces generated on two different machines were measured. The effect of machine control on minimizing near-angle scatter is discussed.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H H Hurt, P A Temple, J M Bennett, D L Decker, and V A Hodgkin "Near-Angle Scatter Measurement On Diamond-Turned Surfaces", Proc. SPIE 0676, Ultraprecision Machining and Automated Fabrication of Optics, (13 February 1987); https://doi.org/10.1117/12.939529
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
Back to Top