10 October 2007 Applications of a MEMS scanner to profile measurement
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Abstract
We propose a compact measurement system for surface profilometry using a MEMS scanner. Beam from a LD is scanned by a miniaturized MEMS mirror with the size of 4mm×3mm (or 6mm×7mm) produces an optically sectioned line profile of a sample. Hence, if we scan the beam vertically and horizontally by this two-dimensional type of MEMS scanner, the optical sections of the sample object are formed, and the scanned result can be caught by a CCD camera and stored to be analyzed by a PC. The feature of this MEMS scanner is in that the mirror is magnetically driven at the resonant frequency. Therefore, due to resonance effect, even this small mirror brings a large scanning angle, high-speed scanning, low noise and low power consumption. The miniaturized light-weight design is also applied to realize the compact measurement system. The principle for measurement known as "triangulation" is very simple, but high accuracy is expected thanks to the recent development of sub-pixel technique. At this point of time, we are fabricating a proto-type equipment for the experimental use and, in near future, we will try to attain a compact three-dimensional measurement system using this scanner and a small bright LED light source.
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Toru Yoshizawa, Toshitaka Wakayama, Hiroshi Takano, "Applications of a MEMS scanner to profile measurement", Proc. SPIE 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V, 67620B (10 October 2007); doi: 10.1117/12.733048; https://doi.org/10.1117/12.733048
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