10 October 2007 Properties of low-temperature grown carbon nanotubes
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Abstract
The growth of carbon nanotubes was investigated using a hot filament assisted CVD system. The silicon and glass substrates coated with catalyst were kept in a CVD furnace tube and the carbon nanotubes were grown by a hot filament assisted decomposition of methane (CH4). Argon (Ar) was used as carrier for carbon. It was found that carbon nanotubes could be grown at as low as 400°C by the hot filament CVD system. The properties of carbon nanotubes were characterized by scanning electron microscopy (SEM), transmission electronic microscopy (TEM), and Raman spectroscopy. Those carbon nanotubes have similar properties as grown at high temperature. This method has high reproducibility and controlling capability of nanotube growth at low temperature region.
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Kun Guo, Kun Guo, Ahalapitiya H. Jayatissa, Ahalapitiya H. Jayatissa, } "Properties of low-temperature grown carbon nanotubes", Proc. SPIE 6768, Nanomaterials Synthesis, Interfacing, and Integrating in Devices, Circuits, and Systems II, 676809 (10 October 2007); doi: 10.1117/12.735319; https://doi.org/10.1117/12.735319
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