12 October 2007 Ultra-miniature all-glass Fabry-Pérot pressure sensor manufactured at the tip of a multimode optical fiber
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Proceedings Volume 6770, Fiber Optic Sensors and Applications V; 67700U (2007) https://doi.org/10.1117/12.734888
Event: Optics East, 2007, Boston, MA, United States
Abstract
The design and fabrication of an ultra-miniature all-glass pressure sensor with a diameter of 125 μm are presented. The sensor consists of a thin flexible silica membrane fused on a capillary tube section, which is assembled at the tip of a standard multimode fiber, thus forming a Fabry-Pérot air cavity whose length depends on applied pressure. Controlled polishing steps including on-line tuning of the diaphragm thickness during the manufacturing process achieve good repeatability and high sensitivity of the pressure sensor. The prototypes obtained with the described manufacturing method could easily have a sensitivity of ~2 nm/kPa (~0.3 nm/mmHg) with a record, so far, of ~5 nm/kPa (~0.7 nm/mmHg). The relatively simple fabrication technique using common and inexpensive equipments and materials combined with the fact that such sensitive sensors with multimode fiber could be interrogated with low-cost commercial interrogators (such as those using white-light interferometry) make this option very attractive for many applications involving pressure measurement. The sensor significant size reduction is valuable especially for the medical field, for applications such as minimally invasive patient health monitoring and diagnostics or small animals testing. Disposable sensors with ultra-miniature size will certainly open the way for new medical diagnostics and therapies.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Éric Pinet, Éric Pinet, Edvard Cibula, Edvard Cibula, Denis Đonlagić, Denis Đonlagić, } "Ultra-miniature all-glass Fabry-Pérot pressure sensor manufactured at the tip of a multimode optical fiber", Proc. SPIE 6770, Fiber Optic Sensors and Applications V, 67700U (12 October 2007); doi: 10.1117/12.734888; https://doi.org/10.1117/12.734888
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