10 September 2007 Si wire waveguide devices
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This paper presents our recent progress in the development of a Si wire waveguiding system for microphotonics devices. We have developed function devices that integrate several fundamental components and confirmed that they exhibited excellent characteristics due to the accuracy of the Si microfabrication. The propagation loss of the waveguide is less than 1.2dB/cm, and branching devices and basic filters show good characteristics. Using the fundamental microfabrication technique, we have developed other passive and dynamic functional devices. As an example of our recent advances using passive devices, we present a polarization diversity system consisting of a separator and a rotator. As a component of a dynamic functional device, we show a low-loss rib-type silicon wire waveguide with low-impedance p-i-n structure and its optical attenuation characteristics.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Watanabe, T. Watanabe, K. Yamada, K. Yamada, T. Tsuchizawa, T. Tsuchizawa, H. Fukuda, H. Fukuda, H. Shinojima, H. Shinojima, S. Itabashi, S. Itabashi, "Si wire waveguide devices", Proc. SPIE 6775, Active and Passive Optical Components for Communications VII, 67750K (10 September 2007); doi: 10.1117/12.733512; https://doi.org/10.1117/12.733512

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