Optical Films Deposited By A Reactive Ion Plating Process

H K Pulker; M BUhler; R Hora

doi:10.1117/12.939544

23 December 1986 Optical Films Deposited By A Reactive Ion Plating Process

H K Pulker, M BUhler, R Hora

Proceedings Volume 0678, Optical Thin Films II: New Developments; (1986) https://doi.org/10.1117/12.939544
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Oxide films on glass substrates, both single and multilayers, were produced by a special reactive ion plating process in the new automatic plating system BALZERS BAP 800. Structure, optical and mechanical film properties have been examined as a function of the deposition parameters. Multilayer systems consisting of TiO2 and Si02 films were deposited, and tests were made concerning optical characteristics, reproducibility and stability. Because of the unique characteristics of the films ion plating promises to become the new technology for the production of optical coatings.

Citation Download Citation

H K Pulker, M BUhler, and R Hora "Optical Films Deposited By A Reactive Ion Plating Process", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); https://doi.org/10.1117/12.939544

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