Assessment and application of focus drilling for DRAM contact hole fabrication

Christoph Noelscher; Franck Jauzion-Graverolle; Thomas Henkel

doi:10.1117/12.798807

2 May 2008 Assessment and application of focus drilling for DRAM contact hole fabrication

Christoph Noelscher, Franck Jauzion-Graverolle, Thomas Henkel

Proceedings Volume 6792, 24th European Mask and Lithography Conference; 67920Q (2008) https://doi.org/10.1117/12.798807
Event: 24th European Mask and Lithography Conference, 2008, Dresden, Germany

Abstract

By assessment of options for the fabrication of small contact holes in DRAM devices the method of focus drilling was identified and investigated to overcome the depth of focus limitations. By use of ArF-dry lithography a practical shrink of the target CD by 15nm can be achieved both with a focus offset double exposure (FODEX) and with a tilted stage approach. This was optimized in simulation and demonstrated by CD measurement on wafer, as well as by electrical measurement on integrated lots. Application of dual lambda focus drilling is limited by the chromatic magnification error of the lens. The increase of hole-to-hole CD variations due to a lower dose latitude and to increased MEEF was characterized. As improvement option the use of a high transmission attPSM was identified.

Citation Download Citation

Christoph Noelscher, Franck Jauzion-Graverolle, and Thomas Henkel "Assessment and application of focus drilling for DRAM contact hole fabrication", Proc. SPIE 6792, 24th European Mask and Lithography Conference, 67920Q (2 May 2008); https://doi.org/10.1117/12.798807

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available