Atmospheric plasma generation for LCD panel cleaning

Gyu-Sik Kim; Chung-Yuen Won; Ju-Yeop Choi; C. H. Yim

doi:10.1117/12.784171

7 January 2008 Atmospheric plasma generation for LCD panel cleaning

Gyu-Sik Kim, Chung-Yuen Won, Ju-Yeop Choi, C. H. Yim

Proceedings Volume 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials; 67940B (2008) https://doi.org/10.1117/12.784171
Event: ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 2007, Gifu, Japan

Abstract

UV lamp systems have been used for cleaning of display panels of TFT LCD or Plasma Display Panel (PDP). However, the needs for high efficient cleaning and low cost made high voltage plasma cleaning techniques to be developed and to be improved. Dielectric-barrier discharges (DBDs), also referred to as barrier discharges or silent discharges have for a long time been exclusively related to ozone generation. In this paper, a 6kW high voltage plasma power supply system was developed for LCD cleaning. The -phase input voltage is rectified and then inverter system is used to make a high frequency pulse train, which is rectified after passing through a high-power transformer. Finally, bi-directional high voltage pulse switching circuits are used to generate the high voltage plasma. Some experimental results showed the usefulness of atmospheric plasma for LCD panel cleaning.

Citation Download Citation

Gyu-Sik Kim, Chung-Yuen Won, Ju-Yeop Choi, and C. H. Yim "Atmospheric plasma generation for LCD panel cleaning", Proc. SPIE 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 67940B (7 January 2008); https://doi.org/10.1117/12.784171

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