9 January 2008 Design and optimization of a novel 2-D optical excited self-resonant microaccelerometer
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Proceedings Volume 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials; 67943C (2008) https://doi.org/10.1117/12.783862
Event: ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 2007, Gifu, Japan
Abstract
A novel 2-D optical excited self-resonant microaccelerometer is presented. And its optical characteristics are discussed in theory. Based on genetic algorithm, the thickness of the polysilicon microbeam and the height of the vacuum cavity are optimized to obtain the optimum of light transmissivity.
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Yu Liu, Yu Liu, Linqing Liao, Linqing Liao, Guangze Zheng, Guangze Zheng, Guochao Wang, Guochao Wang, Hongyun Yang, Hongyun Yang, Rui Xu, Rui Xu, } "Design and optimization of a novel 2-D optical excited self-resonant microaccelerometer", Proc. SPIE 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 67943C (9 January 2008); doi: 10.1117/12.783862; https://doi.org/10.1117/12.783862
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