8 November 2007 Fabrication and characterization of an SOI-based thermally tuned phase modulator
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Proceedings Volume 6796, Photonics North 2007; 679632 (2007) https://doi.org/10.1117/12.779380
Event: Photonics North 2007, 2007, Ottawa, Canada
Abstract
The key process steps in the fabrication of a thermally-tuned silicon-on-insulator (SOI) based phase modulator are detailed. By altering the waveguide temperature, the thermo-optic effect is used to vary the modulator's output. Additionally, various experimental approaches are used to determine the operating characteristics of the resulting device. This includes a swept wave system (SWS) suitable for testing the performance of the phase modulator. Analyses will yield such measurements as insertion loss, polarization dependent loss (PDL), peak wavelength, and ripple period.
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Asuquo B. Eniang, Asuquo B. Eniang, Bassey E. Obiesio, Bassey E. Obiesio, Kufre Akpan, Kufre Akpan, Christopher Raum, Christopher Raum, } "Fabrication and characterization of an SOI-based thermally tuned phase modulator", Proc. SPIE 6796, Photonics North 2007, 679632 (8 November 2007); doi: 10.1117/12.779380; https://doi.org/10.1117/12.779380
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