27 December 2007 Mechanisms of formation of nanostructures with atomic force microscopy
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Abstract
The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.
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H. Lee, L. Peng, K. Wang, M. K. Yapici, J. Zou, H. Liang, "Mechanisms of formation of nanostructures with atomic force microscopy", Proc. SPIE 6799, BioMEMS and Nanotechnology III, 67990D (27 December 2007); doi: 10.1117/12.760121; https://doi.org/10.1117/12.760121
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