Novel electromagnetic micropump

M. Feldmann; S. Demming; C. Lesche; S. Büttgenbach

doi:10.1117/12.759486

27 December 2007 Novel electromagnetic micropump

M. Feldmann, S. Demming, C. Lesche, S. Büttgenbach

Proceedings Volume 6799, BioMEMS and Nanotechnology III; 67990T (2007) https://doi.org/10.1117/12.759486
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

The mergence of partial aspects and functional components of micro actuators and micro fluidic technology allows the development of complex micro systems, which are more and more interesting for MEMS application, especially for BioMEMS. This enormous potential is shown in this article showing the realization of an electro magnetic micro pump. The basic build-up consists of a polymer magnet integrated into a pump chamber of a fluidic PDMS device, which is located above a double layer micro coil. By applying a current, the polymer magnet performs a bidirectional movement, which results in a pumping effect by the two arranged passive check valves being perpendicularly arranged to the flow channels. The valve membrane is flexible and opens the channel towards the flow direction. The advantage of this configuration is that leakage can be avoided by the special geometrical configuration of the fluid chamber and the valves. The fabrication process includes UV depth lithography using AZ9260, electroforming of copper for the double layer spiral coil and Epon SU-8 for insulation, embedding and manufacturing of the valve seat. Furthermore, the fluidic devices are realized by replica molding of PDMS using a multilayer SU-8 master. Furthermore, a new technology for realizing micro polymer magnets was optimized and deployed. Using these fabrication processes, a magnetic micro actuator has already been developed based on the movable plunger principle, which forms the basic set-up of the micro pump. This actuator is monolithically fabricated and successfully tested. In addition, the fluidic system of the micro pump was successfully fabricated and tested. In order to connect the valve seats based on SU-8 to the PDMS fluidic chamber and the valve lips, a special bonding process was developed. The combination of the fluidic system with the electromagnetic part is currently under investigation. The dimension of the micro pump is about 10 × 6 × 3 mm.

Citation Download Citation

M. Feldmann, S. Demming, C. Lesche, and S. Büttgenbach "Novel electromagnetic micropump", Proc. SPIE 6799, BioMEMS and Nanotechnology III, 67990T (27 December 2007); https://doi.org/10.1117/12.759486

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