Novel MEMS-based thermometer with low power consumption for health-monitoring network application

Y. Zhang; T. Ikehara; J. Lu; T. Kobayashi; M. Ichiki; T. Itoh; R. Maeda

doi:10.1117/12.759296

9 January 2008 Novel MEMS-based thermometer with low power consumption for health-monitoring network application

Y. Zhang, T. Ikehara, J. Lu, T. Kobayashi, M. Ichiki, T. Itoh, R. Maeda

Proceedings Volume 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV; 68001V (2008) https://doi.org/10.1117/12.759296
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

We proposed one novel MEMS-based thermometer with low power-consumption for animal/human health-monitoring network application. The novel MEMS-based thermometer was consisted of triple-beam bimorph arrays so that it could work in a continuous temperature range. Neither continuous electric supply nor A/D converter interface is required by the novel thermometer owing to the well-known deflection of bimaterials cantilever upon temperature changes. The triple-beam structure also facilitated the novel thermometer with excellent fabrication feasibility by conventional microfabrication technology. The parameters of the triple-beam bimorph arrays were determined by finite element analysis with ANSYS program. Low stress Au and Mo metal films were used as top and bottom layer, respectively. The deflection of the triple-beam bimorphs were measured on a home-made heating stage by a confocal scanning laser microscopy. The novel bimorphs had temperature responses similar to traditional single-beam bimorphs. Initial bend of the prepared triple-beam bimorphs were dominantly determined by their side beams. The sensitivity of the novel thermometer was as high as 0.1°C. Experimental results showed that the novel thermometer is attractive for network sensing applications where the power capacity is limited.

Citation Download Citation

Y. Zhang, T. Ikehara, J. Lu, T. Kobayashi, M. Ichiki, T. Itoh, and R. Maeda "Novel MEMS-based thermometer with low power consumption for health-monitoring network application", Proc. SPIE 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV, 68001V (9 January 2008); https://doi.org/10.1117/12.759296

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