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8 January 2008 Diamond waveguides: toward an all-diamond platform
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Abstract
Diamond has a range of extraordinary properties and the recent ability to produce high quality synthetic diamond has paved the way for the fabrication of practical diamond devices. This paper details the recent progress in the fabrication of waveguide structures in diamond which are desirable as the basis for quantum key distribution (QKD), quantum computing and high-power, high speed microwave chips. The diamond ridge waveguide structures are produced by photolithography and reactive ion etching (RIE) with some additional processing with a focused ion beam (FIB). The processes currently used are discussed along with experimental results. Future fabrication goals and potential methods for achieving these goals are also presented.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark P. Hiscocks, Christopher J. Kaalund, Francois Ladouceur, Shane T. Huntington, Brant C. Gibson, Steven Trpkovski, David Simpson, Eric Ampem-Lassen, and Steven Prawer "Diamond waveguides: toward an all-diamond platform", Proc. SPIE 6801, Photonics: Design, Technology, and Packaging III, 68010J (8 January 2008); https://doi.org/10.1117/12.769906
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