Flatness and defect measurements for a plane glass using a heterodyne SPR sensor

Ming-Hung Chiu; Chih-Wen Lai; Zhen-Qin Lin; Lih-Horng Shyu

doi:10.1117/12.752534

8 January 2008 Flatness and defect measurements for a plane glass using a heterodyne SPR sensor

Ming-Hung Chiu, Chih-Wen Lai, Zhen-Qin Lin, Lih-Horng Shyu

Proceedings Volume 6801, Photonics: Design, Technology, and Packaging III; 68011C (2008) https://doi.org/10.1117/12.752534
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

An application of surface plasmon resonance (SPR) angular sensor in the surface defect measurement is proposed. The method based on geometrical optics, SPR effects and heterodyne interferometry technique could transform a phase shift into a surface height. As a beam normally is incident into a plate that is with a very small apex angle, the angle is a function of the flatness or defect directly. Thus, to scan the specimen, the surface defect or its flatness is detected. It has some merits, such as, simple, sensitive, and real-time measurements.

Citation Download Citation

Ming-Hung Chiu, Chih-Wen Lai, Zhen-Qin Lin, and Lih-Horng Shyu "Flatness and defect measurements for a plane glass using a heterodyne SPR sensor", Proc. SPIE 6801, Photonics: Design, Technology, and Packaging III, 68011C (8 January 2008); https://doi.org/10.1117/12.752534

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