21 November 2007 Phase-type focusing grating based on micro-optics technique
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Abstract
Considering current Micro-optics technology and using Fresnel diffraction principle and scalar diffraction theory, we design a phase-type focusing grating. It has the function of dispersion and focusing spectrum line. It is the result of integrating phase Fresnel zone plate and the scalar phase grating on the two parallel surface of a piece of fused silica substrate. This design can be used to predigest the light path of the monochromator, making it miniaturization and even micromation. The grating has higher diffraction efficiency. It can also overcome the low diffraction efficiency of conventional grating for the existing of multilevel diffraction. Choosing parameter is the key of designing phase-type focusing grating. Some key parameters are selected on the base of intensively analyzing diffraction optics theory, then the correlation parameters are worked out, and three pieces of binary optic mask zone radii are computed by using MATLAB.
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Changbao Hu, Changbao Hu, Zhenjiang He, Zhenjiang He, Yiping Xu, Yiping Xu, Huosheng He, Huosheng He, Renyi Hu, Renyi Hu, Zijing Tang, Zijing Tang, } "Phase-type focusing grating based on micro-optics technique", Proc. SPIE 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography, 682720 (21 November 2007); doi: 10.1117/12.757780; https://doi.org/10.1117/12.757780
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