Sinusoidal wavelength-scanning interferometers for shape measurements

Osami Sasaki

doi:10.1117/12.757422

Abstract

Sinusoidal wavelength-scanning (SWS) interferometry is unique in that a time-varying interference signal contains phase-modulation amplitude Zb due to the SWS besides a conventional phase &agr;. A rough value of an optical path difference (OPD) longer than a wavelength is obtained from the amplitude Zb, which is useful for shape measurements of rough surfaces. By combing the two values of Zb and &agr;, an OPD longer than a wavelength can be measured with a high accuracy of the order of nanometer, which is useful for shape measurements of optical surfaces. As light sources of SWS interferometers a tunable laser diode with an external cavity is used and a superluminescent diode (SLD) is used with an acousto-optic tunable filter. A shape of a metal surface, a step shape of an optical surface, and a thin-film shape of optical surfaces are measured.

Citation Download Citation

Osami Sasaki, Osami Sasaki, "Sinusoidal wavelength-scanning interferometers for shape measurements", Proc. SPIE 6829, Advanced Materials and Devices for Sensing and Imaging III, 682908 (26 November 2007); doi: 10.1117/12.757422; https://doi.org/10.1117/12.757422

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years