Translator Disclaimer
Paper
17 January 2008 The application of the FFT algorithm associated with CZT in the demodulation of Fabry-Perot pressure sensors
Author Affiliations +
Abstract
In this paper, the FFT (Fast Fourier Transform) demodulation method conbined with CZT(Chirp Z-Translation) is adopted here for Fabry-Perot pressure sensors and its principle and error are analyzed theoretically. CZT is a kind of DFT (Discrete Fourier Transform) in some special condition and it is usually used to thicken the frequency spectrum. CZT can do nothing to reduce the error from FFT and itself may induce error but the error here from FFT and CZT will influence the demodulation resolution a little. In the simulation, cavity lengthes from 397 to 403 μm with the space of 0.5 μm are simulated and the result shows that the relative error of this new method is less than 0.01% and the maximum absolute error is less than 0.05 μm. In the experiment of the demodulation of the MEMS Fabry-Perot pressure sensor, whose metrical range is from 0 to 3 Mpa, its resolution reaches 0.01 MPa, its linearity between the length of the cavity and pressure achieves 0.99316 and the standard deviation between measured pressures and real pressures is less than 0.005 Mpa. By the experiment we can see that this new method adapts to the practice demand with its higher resolution and less calculational quantity.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiajuan Dai, Ming Wang, and Yuhong Ben "The application of the FFT algorithm associated with CZT in the demodulation of Fabry-Perot pressure sensors", Proc. SPIE 6830, Advanced Sensor Systems and Applications III, 683017 (17 January 2008); https://doi.org/10.1117/12.755181
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
Back to Top