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11 January 2008 Research on wave plate error of polarized laser interferometer
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Abstract
Based on Jones matrices theory, the error source and action mechanism of polarized interferometer using four-channel orthogonal signals in nanometer level measurement are researched. It opens a door for selecting optical components, adjusting light set-up and compensating error.The mechanism of nonlinear errors and the variance law of nonlinear errors in laser interferometer, which is caused by nonideal factors of 1/4 wave plates or 1/2 wave plate or all of them, based on polarized phase-shift technology. In this paper, every single error on the polarized interferometer is discussed with the isolation of each wave plate, so that the character of nonlinear error will be reached with composite error. In the experiments, difference delay angle error of two 1/4 wave plates and location angle error is -5°∼5°in interferometer. The aim of this paper is to realize the mechanism of nonlinear errors and the varying rule of nonlinear errors in laser interferometer. All above provide error remove or compensation for laser interferometer in nanometer level measurement with theoretical foundation and search after application.
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Li Duan, Jun Yang, Zh-ihai Liu, and Li-bo Yuan "Research on wave plate error of polarized laser interferometer", Proc. SPIE 6830, Advanced Sensor Systems and Applications III, 68301U (11 January 2008); https://doi.org/10.1117/12.757506
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