4 January 2008 Nanometrology based on white-light spectral interferometry in thickness measurement
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Abstract
A new white-light interferometric technique using in measurement of thickness based on the theory of spectral-domain interference is specified in the paper. The theory of spectral-domain interference broke the limitation of coherence length in interferometry, and gain a much longer measuring range than in time-domain. The optical fiber was applied to Michelson interferometer with the advantage of much convenience of system design. Spectrometer is used to get the spectral-domain signal. With a simple arithmetic, the optical path difference which is related to some parameter could be acquired. A thickness measuring system is designed. The measuring range could be calculated, the error could be forecasted. The simulated result indicats the error of white-light spectral interferometry can be controlled within several nanometers.
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Huifang Chen, Tao Liu, Zhijun Meng, "Nanometrology based on white-light spectral interferometry in thickness measurement", Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 683108 (4 January 2008); doi: 10.1117/12.757777; https://doi.org/10.1117/12.757777
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