The surface treatment of silicon wafer by microwave down-stream plasma etching

Hui Ju; Wenkui Wang

doi:10.1117/12.755881

4 January 2008 The surface treatment of silicon wafer by microwave down-stream plasma etching

Hui Ju, Wenkui Wang

Proceedings Volume 6831, Nanophotonics, Nanostructure, and Nanometrology II; 683114 (2008) https://doi.org/10.1117/12.755881
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Silicon is one of the most common materials used in optical micro-electro-mechanical systems (MEMS). For the optical applications the surface quality plays a vital role in the performance of elements, so the control of surface morphology, such as surface smoothing, is very important to produce optical MEMS elements with high reliability and high quality. The most commonly used etching methods such as reactive ion etching (RIE) always left damage layer on the etched surface leaving the surface with high roughness. In this paper 2.54GHz micro wave excited plasma was used to treat the silicon surface, and the different etching conditions of CF₄ and O₂ mixture were investigated. The surface quality after this down-stream plasma treatment was studied by atomic force microscopy (AFM) measurement.

Citation Download Citation

Hui Ju and Wenkui Wang "The surface treatment of silicon wafer by microwave down-stream plasma etching", Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 683114 (4 January 2008); https://doi.org/10.1117/12.755881

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available