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4 January 2008 Accurate vibration detection of a rough surface
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Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hualin Zeng, Yan Zhou, Songtao Fan, and Jun He "Accurate vibration detection of a rough surface", Proc. SPIE 6831, Nanophotonics, Nanostructure, and Nanometrology II, 683118 (4 January 2008);

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