15 January 2008 Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate
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Abstract
In this paper, we calculated the numeric results of diffraction field in space of X-ray (λ=4.5nm) Fresnel zone plate based on angular spectrum method, analyzed the axial and radial distribution patterns of X-ray Fresnel zone plate. The Full Width at Half-Maximum (FWHM), Depth Of Focus (DOF) and Strehl efficiency of focus spot were studied. Discussed the relationships between FPZ's design parameter and focus spot properties. At the condition of λ=4.5nm and the outmost width Wn=50nm, the size of focus spot is proportional to the outmost width, and increase slowly with the increase of number of zones and focus length; the DOF of focus spot increase at first; when the focus length increased to 40µm, the DOF incline to a constant; the focus spot's Strehl efficiency increased slowly with the increase of number of zones and focus length.
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Ji Jang, Changqing Xie, Xiping Xu, Xiaoli Zhu, Ming Liu, "Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate", Proc. SPIE 6832, Holography and Diffractive Optics III, 68321S (15 January 2008); doi: 10.1117/12.755092; https://doi.org/10.1117/12.755092
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