Design and fabrication of multimode interference couplers based on digital micro-mirror system

Sumei Wu; Xingdao He; Chenbo Shen

doi:10.1117/12.756174

4 January 2008 Design and fabrication of multimode interference couplers based on digital micro-mirror system

Sumei Wu, Xingdao He, Chenbo Shen

Proceedings Volume 6832, Holography and Diffractive Optics III; 68321Z (2008) https://doi.org/10.1117/12.756174
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Multimode interference (MMI) couplers, based on the self-imaging effect (SIE), are accepted popularly in integrated optics. According to the importance of MMI devices, in this paper, we present a novel method to design and fabricate MMI couplers. A technology of maskless lithography to make MMI couplers based on a smart digital micro-mirror device (DMD) system is proposed. A 1×4 MMI device is designed as an example, which shows the present method is efficient and cost-effective.

Citation Download Citation

Sumei Wu, Xingdao He, and Chenbo Shen "Design and fabrication of multimode interference couplers based on digital micro-mirror system", Proc. SPIE 6832, Holography and Diffractive Optics III, 68321Z (4 January 2008); https://doi.org/10.1117/12.756174

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