Research on the measuring technology of minute part's geometrical parameter based on image processing

Xiao-yan Jia; Ze-xin Xiao

doi:10.1117/12.756490

29 November 2007 Research on the measuring technology of minute part's geometrical parameter based on image processing

Xiao-yan Jia, Ze-xin Xiao

Author Affiliations +

Proceedings Volume 6833, Electronic Imaging and Multimedia Technology V; 68332L (2007) https://doi.org/10.1117/12.756490
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

The measuring technology of minute part's geometrical parameter based on image processing is an integration of optics, the mechanics, electronics, calculation and control. Accomplishing the video alteration of measuring microscope, real-time gathering image with CCD, and compiling automatically measuring software in Visual C++6.0 environment. First to do image processing which includes denoise filter, illuminance non-uniformity adjustment and image enhancement, then to carry on the on-line automatic measuring to its geometry parameters. By measuring the minute part's geometry parameters of machineries and integrated circuit in this system, the experimental results indicate that the measuring accuracy could amount to 1 micron, and the system survey stability and usability are all good.

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Xiao-yan Jia and Ze-xin Xiao "Research on the measuring technology of minute part's geometrical parameter based on image processing", Proc. SPIE 6833, Electronic Imaging and Multimedia Technology V, 68332L (29 November 2007); https://doi.org/10.1117/12.756490

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