28 November 2007 Dark point algorithm: a new method to test periodic structures of optical instruments
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Abstract
Periodic structures are of great importance in optical instruments. Actually, the periodic structures in optical instruments are not perfect and this may result in the negative effect on the function of the instruments. It is necessary for us to study the specification of periodic structures. In this paper, a new meaningful parameter, named the total of dark points, is defined based on the characteristic of the overlay of the images of two repeating elements in a periodic structure. Furthermore, a new method with high measure accuracy, named dark point algorithm, is introduced to test the periodic structures. Some testing examples and testing results using dark point algorithm are provided as well. Quantitative description of the quality of periodic structures can be made taking this new method, and it can help to analyze the differences between the structures and their designs. The new method can also be easily realized in many physics processes and with some equipment, it can indeed be used in large scale production and bring economic value to us.
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Debin Cai, Yu Song, "Dark point algorithm: a new method to test periodic structures of optical instruments", Proc. SPIE 6834, Optical Design and Testing III, 683423 (28 November 2007); doi: 10.1117/12.755430; https://doi.org/10.1117/12.755430
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