Experimental study on Zeeman-birefringence dual-frequency laser interferometer with mid-frequency difference

Ya Zhang; Yan Li; Shulian Zhang

doi:10.1117/12.756587

28 November 2007 Experimental study on Zeeman-birefringence dual-frequency laser interferometer with mid-frequency difference

Ya Zhang, Yan Li, Shulian Zhang

Author Affiliations +

Proceedings Volume 6834, Optical Design and Testing III; 68342Y (2007) https://doi.org/10.1117/12.756587
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

With the development of mechanical engineering, the moving velocity of the machine centers and the CMMs are increased to 1000 mm/s. However, at the present time the measurement speed of the commercial heterodyne interferometer can not meet the requirement. The key element of heterodyne interferometer is a dual frequency laser, which produces two lights with different frequency, whose wavelength is used as basic scale for length measurement. The frequency difference of the dual frequency laser is the primary factor which constrains the measurement speed. A new pressure birefringence dual frequency laser was put forward to be the light source of interferometer. Magnetic field was applied on this laser to eliminate frequency difference lock-in, and therefore dual frequency laser with adjustable frequency ranging from 3 MHz to 40 MHz can be obtained, which is called mid-frequency difference. Using the new laser referred above as the light source, the dual frequency laser interferometer system is constructed. Taking the HP 5528A dual frequency laser interferometer as measuring basis, this dissertation has measured a displacement of 10 mm rang in low speed by experimental system. The standard uncertainty of measurement is less than 0.1 μm, and the linearity is less than 0.002%. Through the measure experiment it is proved that this high speed measurement system is feasible and the system we designed for the new light source is correct. It offers a new way to improve the measurement velocity of dual frequency interferometer system.

Citation Download Citation

Ya Zhang, Yan Li, and Shulian Zhang "Experimental study on Zeeman-birefringence dual-frequency laser interferometer with mid-frequency difference", Proc. SPIE 6834, Optical Design and Testing III, 68342Y (28 November 2007); https://doi.org/10.1117/12.756587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available