A digital optical autocollimation method for measuring 2D small angle

Lulu Ma; Bixi Yan; Naiguang Lu

doi:10.1117/12.756858

28 November 2007 A digital optical autocollimation method for measuring 2D small angle

Lulu Ma, Bixi Yan, Naiguang Lu

Proceedings Volume 6834, Optical Design and Testing III; 683431 (2007) https://doi.org/10.1117/12.756858
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

A recognizing and sub-pixel locating algorithm of a crosshair image and a calibrating method of the setup are studied. A sub-pixel locating accuracy and 2" within the full range are achieved. The crosshair captured with a CCD camera was processed and calculated by a computer. The gray values of each cross section of each line were fitted to Gaussian curve with the least squares method, the central points of the curves were fitted to a line with the same method, the intersections of two pair of lines were obtained and 2D displacement in pixels was figured out. With the precision stage and HP5528A dual-frequency laser interferometer, the setup within the full range was calibrated with piecewise linear interpolation method. Eye fatigue and errors by eye sighting and reading are eliminated and measuring efficiency is raised greatly. It is suitable for NC machine stage precision measurement and stage error automatic compensation.

Citation Download Citation

Lulu Ma, Bixi Yan, and Naiguang Lu "A digital optical autocollimation method for measuring 2D small angle", Proc. SPIE 6834, Optical Design and Testing III, 683431 (28 November 2007); https://doi.org/10.1117/12.756858

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