28 November 2007 An optical method of online measurement for the thickness of thin films
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Abstract
This paper introduced an optical method for measuring the thickness of solid thin films. This method is of high measuring speed, noncontact and online work. An experimental system has been constructed for on-line measurement of the thickness of thin film. The experimental results show that the measuring error is lower than 10% in the range of 10~100μm , which fit the production need.
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Min Song, Yaru Zheng, Yongjun Lu, Yanling Qu, "An optical method of online measurement for the thickness of thin films", Proc. SPIE 6834, Optical Design and Testing III, 683433 (28 November 2007); doi: 10.1117/12.756978; https://doi.org/10.1117/12.756978
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