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28 November 2007 Key techniques in an absolute measurement method of spherical lens
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Abstract
An absolute measurement method of spherical lens with Fiber Point Diffraction Interferometer (FPDI) was developed. To achieve a high accuracy, several key techniques are discussed such as: short coherence length laser, interferogram collecting, experiment set up, and reconstruction of wave front. Through these techniques an experiment system has been built. The 5-step phase shifting interferograms are collected. The wave front is fitted by Zernike polynomials and reconstructed. The repeated measurement result has a good performance compared to a Zygo GPI interferometer.
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Shuo Wu, Tao geng Zhou, Ding guo Sha, Jia ming Lin, and Lin feng Chen "Key techniques in an absolute measurement method of spherical lens", Proc. SPIE 6834, Optical Design and Testing III, 683435 (28 November 2007); https://doi.org/10.1117/12.757044
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