Optical fiber method for measuring small plane flatness error

Shan Jin; Yong Lv; Qing Shan Chen

doi:10.1117/12.757668

28 November 2007 Optical fiber method for measuring small plane flatness error

Shan Jin, Yong Lv, Qing Shan Chen

Proceedings Volume 6834, Optical Design and Testing III; 68343J (2007) https://doi.org/10.1117/12.757668
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

A non-contact flatness error of small plane measurement method based on reflective optical fiber displacement sensor is presented. Using the model of single optical fiber, the light from laser source is modulated by the modulator. The modulated light passes through a circulator to an optical switch to realize the Time Division Multiplex (TMD) of optical fiber sensing array. The reflective light passes through the circulator to a common detector and process circuit. This configuration avoids the problem of parameter disagreement of multi-processing circuits, improves the measurement efficiency and cuts down the cost. The intensity fluctuation of the reference light is adopted to rectify the effects of the power variation of laser source, so as to improve stability of the system. The experiment results show that the measurand flatness error is consistent with the measurement result of Three Coordinates Measuring Machine (CMM). The architecture of the system is simple that it can be used in flatness error measurement of mechanical parts of different shapes by changing the number and layout of the optical fiber sensing array flexibly.

Citation Download Citation

Shan Jin, Yong Lv, and Qing Shan Chen "Optical fiber method for measuring small plane flatness error", Proc. SPIE 6834, Optical Design and Testing III, 68343J (28 November 2007); https://doi.org/10.1117/12.757668

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