A novel ellipsometer for measuring thickness of oxide layer on the surface of silicon sphere

Jitao Zhang; Yan Li

doi:10.1117/12.756865

28 November 2007 A novel ellipsometer for measuring thickness of oxide layer on the surface of silicon sphere

Jitao Zhang, Yan Li

Proceedings Volume 6834, Optical Design and Testing III; 683443 (2007) https://doi.org/10.1117/12.756865
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

The Avogadro constant NA is used as one of the several possible routes to redefinition of the kilogram in metrology today. Usually in order to accurately determine NA, the volume of a perfect single crystal silicon sphere of nearly 1 kg mass should be measured with a high relative uncertainty, i.e. about 1×10^-8. However, the oxide layer grown on the surface of the silicon sphere causes a remarkable systematic difference between the measured and real diameters. A novel ellipsometer has been developed to determine the thickness of the oxide layer accurately and automatically. The arrangement of this instrument is suitable for measuring the layer on the sphere surface. What's more, the measuring is faster by optimizing the parameters and developing the algorithm of calculating the thickness and refractive index of the oxide layer. The preliminary simulation result has present. Thus, the uncertainty of the diameter measurement caused by the oxide layer can be observably reduced. And the further improving of this ellipsometer is discussed in the end.

Citation Download Citation

Jitao Zhang and Yan Li "A novel ellipsometer for measuring thickness of oxide layer on the surface of silicon sphere", Proc. SPIE 6834, Optical Design and Testing III, 683443 (28 November 2007); https://doi.org/10.1117/12.756865

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available