An active interconnecting mechanism for free-space optic applications

Ping Zhang; Kevin Le; Lun-Chen Hsu; Praveen Pandojirao-Sunkojirao; Smitha Malalur-Nagaraja-Rao; J.-C. Chiao

doi:10.1117/12.757799

29 November 2007 An active interconnecting mechanism for free-space optic applications

Ping Zhang, Kevin Le, Lun-Chen Hsu, Praveen Pandojirao-Sunkojirao, Smitha Malalur-Nagaraja-Rao, J.-C. Chiao

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 683604 (2007) https://doi.org/10.1117/12.757799
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

In this paper, a new method for interconnecting free-space micro-optoelectromechanical system (MOEMS) devices is developed. The heterogeneous design and assembly concept is demonstrated by a pair of V-shape actuators and related assembly mechanism, fabricated on a silicon-on-insulator (SOI) wafer. A two-channel free-space DWDM filter has been assembled and characterized. The results show low insertion losses. The device architecture allows hybrid optical system integration on a single platform. The assembled optical devices can be made of different materials, on different substrates and/or with incompatible fabrication techniques. The integration platform provides potentials for realizing a micro optical bench with equivalent optical performance that currently require bulk optics setups.

Citation Download Citation

Ping Zhang, Kevin Le, Lun-Chen Hsu, Praveen Pandojirao-Sunkojirao, Smitha Malalur-Nagaraja-Rao, and J.-C. Chiao "An active interconnecting mechanism for free-space optic applications", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683604 (29 November 2007); https://doi.org/10.1117/12.757799

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KEYWORDS

Mirrors

Micromirrors

Optical filters

Actuators

Dense wavelength division multiplexing

Semiconducting wafers

Free space optics

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