17 January 2008 Proposal and investigation for a planar MOEMS 1×8 wavelength-selective switch
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Abstract
This paper presents a new wavelength-selective switch by combining silicon micromaching and microassembly techniques. The 1×8 wavelength-selective switch (WSS) based on micro electro mechanical systems (MEMS) technology is proposed and fabricated with micro electromagnetic actuators, reflecting prisms and narrow-band thin films filters. And a 8×8 WXC prototype node is implemented by using 1×8 WSSs as building elements. The working principle and the configuration of the micro electromagnetic actuator are illuminated. By analysis, the property suits for the application when the inputs are 2V, and the best fiber-to-fiber insertion loss 5dB is gotten.
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Xiaoqi Li, Xiaoqi Li, Jingqiu Liang, Jingqiu Liang, Degui Sun, Degui Sun, Yanchao Zhong, Yanchao Zhong, Wei Li, Wei Li, Zhongzhu Liang, Zhongzhu Liang, } "Proposal and investigation for a planar MOEMS 1×8 wavelength-selective switch", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683608 (17 January 2008); doi: 10.1117/12.756879; https://doi.org/10.1117/12.756879
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