New developments on polymer-based MEMS phase shifters

Jianqun Wang; Thermpon Ativanichayaphong; Ying Cai; Wen-Ding Huang; Mu Chiao; J.-C. Chiao

doi:10.1117/12.754991

4 January 2008 New developments on polymer-based MEMS phase shifters

Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Mu Chiao, J.-C. Chiao

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360I (2008) https://doi.org/10.1117/12.754991
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Phase shifter is one of the core components for phased-array antennas which find wide applications in satellite systems, telecommunications, wireless systems, radar systems and tracking systems. The current high-frequency phase shifters are mainly built upon active semiconductor technologies which suffer from high fabrication and assembly costs. In this work, we propose a cost-effective approach to fabricate distributed MEMS transmission line phase shifters on a polymer-glass substrate. The fabrication procedure is compatible with CMOS and post-CMOS processes. The polymerglass phase shifter was characterized from DC to 26 GHz. The measurements show a phase shift of 120° and a 2.5-dB insertion loss at 26 GHz.

Citation Download Citation

Jianqun Wang, Thermpon Ativanichayaphong, Ying Cai, Wen-Ding Huang, Mu Chiao, and J.-C. Chiao "New developments on polymer-based MEMS phase shifters", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360I (4 January 2008); https://doi.org/10.1117/12.754991

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