4 January 2008 New developments on polymer-based MEMS phase shifters
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Phase shifter is one of the core components for phased-array antennas which find wide applications in satellite systems, telecommunications, wireless systems, radar systems and tracking systems. The current high-frequency phase shifters are mainly built upon active semiconductor technologies which suffer from high fabrication and assembly costs. In this work, we propose a cost-effective approach to fabricate distributed MEMS transmission line phase shifters on a polymer-glass substrate. The fabrication procedure is compatible with CMOS and post-CMOS processes. The polymerglass phase shifter was characterized from DC to 26 GHz. The measurements show a phase shift of 120° and a 2.5-dB insertion loss at 26 GHz.
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Jianqun Wang, Jianqun Wang, Thermpon Ativanichayaphong, Thermpon Ativanichayaphong, Ying Cai, Ying Cai, Wen-Ding Huang, Wen-Ding Huang, Mu Chiao, Mu Chiao, J.-C. Chiao, J.-C. Chiao, } "New developments on polymer-based MEMS phase shifters", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360I (4 January 2008); doi: 10.1117/12.754991; https://doi.org/10.1117/12.754991

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