4 January 2008 Characterizations of microcantilever chemical sensors based on SOI material
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Abstract
This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.
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Fangrong Hu, Fangrong Hu, Dajia Wang, Dajia Wang, Chuankai Qiu, Chuankai Qiu, Aina Wang, Aina Wang, Hongtao Gao, Hongtao Gao, Jun Yao, Jun Yao, } "Characterizations of microcantilever chemical sensors based on SOI material", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360S (4 January 2008); doi: 10.1117/12.758232; https://doi.org/10.1117/12.758232
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