4 January 2008 Piezoelectric capacitive power generator from vibration energy
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Abstract
A vibration-powered micro-power-generator has been presented in this paper, which has integrated two different energy harvesting mechanisms, e.g., Capacitive and Piezoelectric Mechanisms. The periodic vibration of the mass on movable electrode causes the variation of the capacitance, and the strain in the piezoelectric film. These two mechanisms can harvest the vibration energy and generate current in the output circuit. By using two different metals with large difference in working function as the two electrodes of the capacitor, our design, the combination of these two different scavenge mechanisms, can overcome the dependence of the traditional capacitive converter on the separate voltage source and improve the efficiency of power conversion. The volume of the designed device is less than 0.8 cm3. The simulated results reveal that this energy converter can provide an average output power of 82.21μW at an external vibration with a frequency of 111.4 Hz and amplitude of 0.2g.
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Yangjian Zhang, Yangjian Zhang, Lin Li, Lin Li, Haisheng San, Haisheng San, Xuyuan Chen, Xuyuan Chen, } "Piezoelectric capacitive power generator from vibration energy", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360Y (4 January 2008); doi: 10.1117/12.756131; https://doi.org/10.1117/12.756131
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